Physics and Technology of High-k Materials 8

Physics and Technology of High-k Materials 8

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The issue of ECS Transactions will cover comprehensively all the aspects of high-k material physics and technology: Diverse High Mobility Substrates, High-k Materials, Metal Gate Electrode Materials, Deposition Techniques, Bulk Material Properties, Flat-Band Voltage Issues and Control, Interfaces, Gate Stack Reliability, Electrical, Chemical, and Physical Chatracterization, Novel Applications, High-k and Diverse Insulators for Photonics, High-k Processing/ Manufacturing.Introduction Understanding band alignment in a metal/oxide/semiconductor ( MOS) structure is a crucial issue for ... Figure 1 shows a generic energy band diagram of a metal-oxide-semiconductor stack, where the gate metal is the outer layer.


Title:Physics and Technology of High-k Materials 8
Author: S. Kar, M. Houssa, S. Van Elshocht, D. Landheer, D. Misra, K. Kita
Publisher:The Electrochemical Society - 2010-10
ISBN-13:

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